WaferScan Non-Contact Profilometer Rudolph Tamar Technology for Parts 7137

Description

Tamar Technologies WaferScanner w/ Wafer Chucks + Software & User Manual (7137)R In good cosmetic condition. Powers on. Shows a clear image. Objective turret hold 5 objectives and it rotates well. X and Y stage axis move in all direction with the joystick. May need calibration. See pictures for more detail. Includes: Tamar Waferscanner w/ Granite Isolation Slab Software (See pictures for more detail) ​Software User Manual Objectives Manufacturer: Olympus LmPlanFLN 5x/0.13 | ∞/-/FN26.5 10x/0.25 | ∞/-/FN26.5 20x/0.40 | ∞/0/FN26.5 50x/0.50 | ∞/0/FN26.5 100x/.80 | ∞/0/FN26.5 Wafer Chucks Blank Chuck 1" Chuck SBF-11791-009 2" SBF-11792-009 3" SBF-11976-009 5" SBF-11790-009 100mm Chuck Holder Rack Tamar Quality Calibration Wafers Angled Gage Blocks "1 & 3 Degree and 20 Min" Software Viewsonic, EVGA Driver Installation CD, Heidenhain IK 5000 Quadra-Check, CyberLink Power DVD 10, Nero 9 Essentials, SuperMicro Device Drivers Tamar Technologies WaferScan Upgrade Version 2.651 Date: 5/1/08
Rudolph Technologies, Tamar Technology WaferScan w/ Wafer Chucks + Software & User Manual (7137)R
Selling for parts.  Cannot get the lower objective to respond.
In good cosmetic condition. Powers on. Shows a clear image. Objective revolver rotates well. X, Y, Z stages move freely/smoothly in all directions with the joystick. White Cart is NOT Included. See pictures for more detail.
We took the following video when we listed this initially however we pulled it out of storage recently and could not get the bottom objective to focus.  Now selling for parts.
Video Here:
https://youtu.be/gDNnGzhC634
Includes:
Tamar Waferscan w/ Granite Isolation Slab on Cart with Casters
Keyboard and Monitor
Joystick
Software (See pictures for more detail)
​Software User Manual
Objectives
Manufacturer: Olympus
LmPlanFLN
5x/0.13 | ∞/-/FN26.5
10x/0.25 | ∞/-/FN26.5
20x/0.40 | ∞/0/FN26.5
50x/0.50 | ∞/0/FN26.5
100x/.80 | ∞/0/FN26.5
Seiwa Optical M Plan Apo 10 SB ∞ / 0 Infinity Microscope Objective Lens SLWD39 (Objective under Stage)
Wafer Chucks
Blank Chuck
1" Chuck
SBF-11791-009 2"
SBF-11792-009 3"
SBF-11976-009 5"
SBF-11790-009 100mm
Chuck Holder Rack
Tamar Quality Wafers
Parker ZETA57-51 Stage Motors with Vexta Clean damper 06CL-6.3F (X 3)
Tamar Gold Standard Daily Qual FPA
Qty: 2
Angled Gage Blocks
"1 & 3 Degree and 20 Min"
Ref. Gage Block Set of 10; Sizes: 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1.0, 1.3, 1.5, 1.7 & 2.0 MMP/N 321-02003
Software
Viewsonic,
EVGA Driver Installation CD,
Heidenhain IK 5000 Quadra-Check,
CyberLink Power DVD 10,
Nero 9 Essentials,
SuperMicro Device Drivers
Tamar Technologies WaferScan Upgrade
Version 2.651
Date: 5/1/08
Shipping
Weight: ~1000 lbs
Actual Weight:
Dimensions(LxWxH): 41 x 35 x 72"
Actual Dimensions:
Tamar Technology was purchased by Rudolph.  The following is taken from Metrology World 11/04/11:
Tamar Technology Ships Its First Fully Automated WaferScan System
Newbury Park, CA - Tamar Technology, a precision metrology company specializing in metrology solutions for the semiconductor, hard disk drive and medical device industries, shipped its first fully automated WaferScan system to a major semiconductor fab. The system addresses metrology requirements for Through Silicon Via (TSV) etch depth, deep trench depth, wafer thickness, photo-resist thickness, and hole diameter.
The system includes Tamar's proprietary Wafer Thickness Sensor (WTS) to measure the depth of TSVs and deep narrow trenches. The system also includes Tamar's proprietary Visible Thickness Sensor (VTS) to measure thickness of photo resist, thick films and various polymers. Integrated with Tamar's sensor is a video microscope for automated alignment and vision measurements, such as hole diameter.
"Tamar's WTS can measure etch depth and wafer thickness of single or bonded wafers. The measurement is optical and non-destructive and it is the only technology that can measure any TSV or trench regardless of the diameter or depth," says David Grant, president of Tamar Technology. "One of the challenges that Tamar's sensors were able to overcome was the large range of etch measurements required, which can be hundreds of microns deep and as thin as one micron wide."
Tamar's VTS measures the thickness of films and polymers on the surface and at the bottom of etched features to ensure the presence of material and to monitor the thickness variation across the wafer.
This system is flexible and can be configured with multiple sensors to accommodate different measurement requirements. "The combination of a microscope with the different sensors allows machine vision alignment producing the accurate positioning required for these precision applications," says Grant. "It runs fully automated using programmed recipes and communicates with the factory host via SECS/GEM." Grant adds, "Installation of this tool indicates how well our technology has been accepted and validates our efforts in advancing to fully automated, clean room class 1 semiconductor tools."
The Tamar system is used in production to monitor various processes and helps to reduce costs. Because of its non-destructive nature, product yields are improved as process excursions are monitored in near real time.
SOURCE: Tamar Technology
Please Ask For Shipping Quote
Sold as is with 30 day Right of Return, only pictured items included
Easy return/refund for any reason
Anacapa Equipment
RETURNS
Anacapa Equipment Brokers, Inc. (“Seller”) strives to offer excellent customer service.   You may return any equipment purchased from us for any reason within thirty (30) days after your receipt of the equipment for a full refund of the purchase price, provided that returned items are received in the same condition as sent.  We DO NOT ship internationally.  If you are using a freight forwarder then returns are VOID.
SHIPPING
All equipment purchased is shipped within one (1) business day (subject to freight availability) after receipt of payment and is shipped FOB place of shipment.  We only charge actual shipping cost.  If eBay overcharges for shipping, we issue an immediate refund for the difference. If you are undercharged, we will absorb the cost.
We DO NOT ship internationally.  IF you are using a freight forwarder then returns are VOID.
LIMITED WARRANTY
Buyer acknowledges that the equipment is being sold “as is" and without any warranty of merchantability or fitness for a particular use.  The entire risk as to the quality and performance of the equipment is with the Buyer.  Should the equipment prove defective following its purchase the Buyer and not the Seller, manufacturer, distributor, or retailer assumes the entire cost of all necessary servicing or repair.  Buyer may inspect the equipment prior to purchase and placement of the order.  Failure to inspect prior to placement of an order is deemed a waiver of Buyer’s right to inspect.  Buyer is responsible for determining the suitability of the equipment for its application.  Seller assumes no liability for the use or misuse of any equipment purchased by Buyer. It is assumed that the equipment will be installed and operated by qualified personnel. The Buyer agrees that the Seller shall not be held responsible or liable for any injuries or damages, whether incidental or consequential, associated in any way with the equipment purchased.
The Buyer, by purchasing this equipment, indicates its acknowledgment of, and agreement, to the terms of this limited warranty
.
INDEMNITY
Buyer shall be solely liable for, and shall defend, indemnify, and hold Seller, its Affiliates, and all of their respective directors, officers, employees, agents, and independent contractors (“Indemnitees”) harmless from and against any and all damages, liabilities, injuries, losses, costs (including reasonable attorneys and experts fees at trial and on appeal), and expenses which may be incurred by, asserted against, or recoverable from any Indemnitee as a result of any actual or threatened action, suit or proceeding arising out of or relating in any way to the purchase of equipment from Seller.  The validity and interpretation of this Agreement and the enforcement thereof shall be governed by the laws of the State of California without regard to any principles governing conflicts of laws.  Any dispute arising from the purchase of equipment from Seller must be resolved in the State Courts of California.
Measurement equipment
Wafer Scan
Metrology
Semiconductor
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